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                              Nanochem Technical Papers and Information Library

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                              The Nanochem Technical Library contains a partial list of technical resources covering analytical efficacy, process applications and demonstrated affect on end products such as wafers and devices.

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                              Gas Purification Technical Information

                              The tables below list technical papers, posters, and publications about Nanochem purifier material types. The list is sorted into groups based on usage with different gas types and applications.?The items listed here comprise a partial listing.

                              The purifier material type (Metal-X, NHX, OMX, etc.) is listed on the left and the name of the publication is listed on the right. Click on the name of the publication to view and/or download a copy.

                              Please contact a Purifier Expert for other technical information relevant to your application and interests beyond that which is listed here.

                              Purification of Corrosive Gases

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                              CleanCorr Anhydrous Hydrogen Fluoride for Selective Etch Processes:? Measurement and Control of Water and Metallic Impurities
                              ?
                              Metal-X NANOCHEM? Metal-X? Corrosive Gas Purification
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                              Metal-X High Pressure POU Purification of Corrosive Gases
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                              Metal-X Measurement and Control of Trace Moisture in Corrosive Gases
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                              Metal-X Moisture requirement in RPCVD Si epitaxy
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                              Metal-X Contamination Control in Carbon Monoxide Processes
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                              Metal-X Removal of Volatile Metals from Corrosive Gases by a New Purifier
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                              Metal-X Advances in Purifier Technology: Removal of Volatile Metal Complexes and Moisture From HCl and CO Etch Gases
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                              Metal-X New Corrosive Gas Purifier Offers Improved Moisture Performance and Removal of Volatile Metal Complexes
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                              Metal-X SemiCon West 2001 - Removal of Volatile Metals from Corrosive Gases by a New Purifier

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                              Purification of Hydrides

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                              ASX-II? Characterization of High-Purity Arsine and Gallium Arsenide Epilayers Grown?
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                              PHX Trace Moisture Contamination in UHP PH3 Techniques for Measurement and Control
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                              PHX Factors Influencing the Purity of Electronic Grade Phosphine Delivered to MOCVD Tools
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                              ASX,NHX,PHX Detection and Control of Oxy-Impurities in Group V Hydride Gases and Gas Delivery Systems
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                              OMX, PHX,
                              ASX, ASX-II
                              Review of Integrated Contamination Control for GaAS and InP MOVCD Process
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                              OMA Evaluation Of Commercial Ammonia Purifiers
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                              OMA Using tunable diode laser spectroscopy to detect trace moisture in? ammonia
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                              OMA, NHX,
                              NHX-plus, In2Go
                              Identification and Quantification of Impurities Critical to the Performance on Nitride
                              ?
                              NHX, NHX-plus, In2Go Impurities in Hydride Gases Part 1
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                              NHX, NHX-plus, In2Go Impurities in Hydride Gases Part 2
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                              NHX-plus Measurement and Control of Trace Carbon Dioxide in Ultra-High Purity Ammonia for the Semiconductor Industry
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                              NHX-plus Effect of Moisture in Ammonia on LED Device Performance Poster Final -? ICMOVPE 2010

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                              Purification of
                              Non-Methane Hydrocarbons

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                              HCX New Purifier Material for Hydrocarbon Removal from Process Gases

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                              Purification of Welding Gases

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                              OMX? How Weld Torch Hose Materials Affect Shielding Gas Quality
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                              OMX? Porosity in Aluminum Welding?
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                              OMX? Getting it Right Gases in Welding
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                              OMX Shielding Gas Quality Improves Weld Quality
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                              OMX, In2Go, WeldAssure Nanochem - Welding

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                              Gas Purification in Abatement Applications

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                              Ultimasorb Developments in Abatement Technology for MOCVD Processing

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                              Desulfurization

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                              GuardBed Presentation on GuardBed Information
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                              GuardBed General Information on Desulfurization Materials, Capabilities and Applications
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                              GuardBed Products for Desulfurization of Hydrocarbons
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                              GuardBed Products for Natural Gas
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                              GuardBed Turnkey Desulfurization/Purification Solutions
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                              GuardBed Products for Liquid Fuels
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                              GuardBed Hydrocarbon Feed Stream vs. GuardBed Product Cross Reference Table

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                              Purification

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