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                              Purification for Electronics Applications

                              10_Purification of gases used in electronics

                              Nanochem Gas Purifiers for Electronics Applications such as fabrication of Si-based logic and memory integrated circuits, LEDs, and Flat Panel Displays.

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                              Nanochem UHP Gas Purification.

                              Learn more about Nanochem capabilities - get the?Nanochem?Purifier Overview Brochure.

                              Go to the?Nanochem?Product Data page on this website to learn more about?Nanochem:

                              • types of gas purification media
                              • choices for purifier hardware configurations

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                              Gas Purification Optimized for Semiconductor Fabrication Applications.

                              Nanochem??Gas Purifiers enable the "extreme purification" of gases used in wafer and semiconductor fabrication, including the removal of dopants and volatile metals.

                              "Live gas" testing is done to ensure that Nanochem??gas purifiers meet or exceed performance specifications in the specific gas for which they are marketed.

                              Nanochem? purifiers remove:

                              • moisture (water)
                              • hydrocarbons
                              • halocarbons
                              • carbon dioxide
                              • oxygen
                              • dopants
                              • volatile metals
                              • more

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                              Please inquire regarding specific impurities of interest to your application.

                              On this page is a list of gases we purify using Nanochem??gas purifiers.

                              If a gas of interest to your application does not appear here, please?Contact Us.

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                              Looking for a technical paper or pdf not found on this page? Visit our Nanochem Technical Library.

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                              Purification

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                              Gases We Purify?(partial listing)

                              Items are listed alphabetically by chemical name. For the same list, sorted by chemical formula, visit this page.

                              If the gas material of interest to you does not appear in this list, please contact us.

                              Acetylene Hydrogen Bromide
                              Air Hydrogen Chloride
                              Ammonia Hydrogen Fluoride
                              Argon Hydrogen Selenide
                              Argon (welding) Hydrogen Sulfide
                              Arsine Isobutane
                              Arsine (1-10%) Krypton
                              Boron Trchloride Methane
                              Boron Trifluoride Methyl Fluoride
                              Butane Methyl Silane
                              Butene Methylchloride
                              Carbon Dioxide MethylMercaptan
                              Carbon Disulfide Monochlorosilane
                              Carbon Monoxide Monomethyl Silane
                              Carbon Tetrachloride Neon
                              Carbon Tetrafluoride Nitric Oxide
                              Carbonyl Sulfide Nitrogen
                              Chlorine Nitrogen Dioxide
                              Chlorocarbons Nitrous Oxide
                              Clean Dry Air Octafluorocyclobutane
                              Cyclo-hydrocarbons Octafluorocyclopentene
                              Deuterium Octafluoropropane
                              Dichlorosilane Oxygen
                              Difluoromethane Ozone
                              Disilane Perfluorobutane
                              Ethane Phosgene
                              Ethylene Phosphine
                              Fluorocarbons Phosphine (1-10%)
                              Germane Propane
                              Germane (1-10%) Propylene
                              Germanium Tetrachloride Silane
                              Germanium Tetrafluoride Silicon Tetrachloride
                              Halocarbons Silicon Tetrafluoride
                              Helium Sulfur Dioxide
                              Hexafluorobutadiene Sulfur Hexafluoride
                              Hexafluoroethane Trichlorosilane
                              Hexafluoropropylene Trifluoromethane
                              Hydrocarbons Xenon
                              Hydrogen ?

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